| JSPP Program | |||||
| April 21(Mon) | |||||
| 9:15-9:20 | 1. Opening Remarks and Opening Lecture (Chair: S. Hamaguchi) | ||||
| @ | Kunihide Tachibana | Japan | Review of my 40-years Research Work in Plasma Electronics | ||
| 10:00-10:50 | 2. Simulations and diagnostics I (Chair: ) | ||||
| @ | 10:00-10:25 | Jae Koo Lee | Korea | Particle and Fluid Simulations of High-Pressure Micro Plasmas | |
| @ | 10:25-10:50 | Kanya Kusano | Japan | Study of Multi-scale and Multi-physics Dynamics with Macro-Micro Interlocked Simulations | |
| 10:50-11:10 | \ BREAK \ | ||||
| 11:10-12:05 | 3. Simulatrions and diagnostics II (Chair: ) | ||||
| @ | 11:10-11:35 | Akihiro Kono | Japan | Laser Thomson Scattering Diagnostics of Low-Temperature Plasmas : a Surface Wave Plasma Study and a Laser Disturbance Study | |
| @ | 11:35-11:50 | Hiroshi Akatsuka | Japan | Population Kinetics and Number Densities of Excited Species in Low-Pressure Discharge Nitrogen Plasma | |
| @ | 11:50-12:05 | Tomihito Ohba | Japan | Spatial Density Distribution of Argon Metastables in a 2f-CCP using Laser Absorption Spectroscopy | |
| 12:05-13:30 | \ LUNCH \ | ||||
| 13:30-15:15 | 4. Atmospheric pressure plasmas I (Chair: ) | ||||
| @ | 13:30-14:00 | Zoran Lj. Petrović | Serbia | Voltampere Characteristics of Low Current Micro Discharges and Transport Coefficients in CFx/CF4 Mixtures | |
| @ | 14:00-14:25 | Christophe Leys | Belgium | Discharges in Bubbles and in Systems with Liquid Electrodes | |
| @ | 14:25-14:50 | Takehiko Sato | Japan | Characteristics of Low Temperature Plasma Flow at Atmospheric Pressure and its Application to Medical Field | |
| @ | 14:50-15:15 | Mirko Cernak | Slovakia | High-Speed, Low-Cost Atmospheric-Pressure Plasma Processing using Diffuse@Coplanar Surface Barrier Discharge | |
| 15:15-15:45 | \ BREAK \ | ||||
| 15:45-17:15 | 5 Atmospheric pressure plasmas II (Chair: ) | ||||
| @ | 15:45-16:10 | Jan D. Skalny | Slovakia | Analysis of Ions Produced by DC Corona Discharges in Air at Atmospheric Pressure | |
| @ | 16:10-16:35 | Gordana Malović | Serbia | Mass Analysis of Products of Amospheric Pressure Discharges | |
| @ | 16:35-17:00 | Katsuhisa Kitano | Japan | LF Micro Plasma Jets with a Single HV Electrode and the Generation of Free Radicals in Liquids | |
| @ | 17:00-17:15 | Serge Shapoval | Russia | Reflection Efficiency of Two-Dimensional Square Symmetry Unmagnetized Plasma Photonic Crystals in Microwave Wavelength Range | |
| 19:00-21:00 | \ BANQUET \ | ||||
| April 22(Tue) | |||||
| 9:00-10:20 | 6. Semiconductor processing I (Chair: ) | ||||
| @ | 9:00-9:25 | Vahid Vahedi | USA | Plasma-Wall Interactions in Inductively Plasma Reactors and a Novel Method for Wall Condition Control | |
| @ | 9:25-9:50 | Song Yun Kang | Japan | Theoretical Study for Fluorocarbon Plasma Chemistry | |
| @ | 9:50-10:05 | Takashi Yagisawa | Japan | Modeling of a Feature Profile Evolution under Micro-Loading Effects in SiO2@Etching | |
| @ | 10:05-10:20 | Jozef Brcka | USA | The Effect of the Hydrogen in the RLSA CVD of the SiNy(Hz) Films | |
| 10:20-10:40 | \ BREAK \ | ||||
| 10:40-12:00 | 7. Semiconductor processing II (Chair: ) | ||||
| @ | 10:40-11:05 | Gottlieb S. Oehrlein | USA | Studies of Plasma-Polymer Interactions for Nanoscale Patterning of Materials | |
| @ | 11:05-11:30 | Kohei M. Itoh | Japan | Process Monitoring using Silicon Isotope Superlattices | |
| @ | 11:30-11:45 | James J. Munro | UK | Theoretical Study of a CF4 Plasma Chemistry using an Improved Set of Cross-Section Data | |
| @ | 11:45-12:00 | Fukutaro Hamaoka | Japan | Numerical Prediction of a Micro-Scale Etching of Si under Plasma Molding in 2f-CCP in SF6/O2 | |
| 12:00-13:30 | \ LUNCH \ | ||||
| 13:30-15:00 | 8. Poster Session (Chair: ) | ||||
| 15:00-15:10 | \ BREAK \ | ||||
| 15:10-16:40 | 9. New trends in plasma science (Chair: ) | ||||
| @ | 15:10-15:35 | Sadruddin Benkadda | France | Simulation Studies of the Nonlinear Dynamics of Drift Wave Turbulence in Dusty Plasma | |
| @ | 15:35-16:00 | Rikizo Hatakeyama | Japan | Plasma Processing Creation of Novel-Functional Nanocarbons | |
| @ | 16:00-16:25 | Masaharu Shiratani | Japan | Plasma Processes for Constructing Nanosystems in the 3rd Generation Nanotechnology | |
| @ | 16:25-16:40 | Galina V. Shpatakovskaya | Russia | Quasi-Classical Estimation of Ionization Potentials and Partition Functions of Ions | |
| 16:40-17:00 | \ BREAK \ | ||||
| 17:00-17:50 | 10. Atmospheric pressure plasmas III (Chair: ) | ||||
| @ | 17:00-17:25 | Eva Stoffels-Adamowicz | Netherland | Cold Plasma Treatment: Wound Care and Other Applications | |
| @ | 17:25-17:50 | Takanori Ichiki | Japan | Development of Atmospheric-Pressure MicroICP Jet and Its Application in Microsystem Technology | |
| 19:00-21:00 | \ BANQUET \ | ||||
| April 23(Wed) | |||||
| 9:00-10:15 | 11. Atomic processes in plasmas I (Chair: ) | ||||
| @ | 9:00-9:25 | Mark D. Bowden | UK | Pulsed RF Plasmas: Controlling Plasma Properties by Pulse-Shaping | |
| @ | 9:25-9:50 | Hirotaka Toyoda | Japan | Measurement and Control of Energetic Rare Gas Atoms in Magnetron Plasma | |
| @ | 9:50-10:15 | Uwe Czarnetzki | Germany | Electric Field Reversals in the Sheath Region of Capacitively Coupled Radio Frequency Discharges at Different Pressures | |
| 10:15-10:35 | \ BREAK \ | ||||
| 10:35-11:50 | 12. Atomic processes in plasmas II (Chair: ) | ||||
| @ | 10:35-11:00 | Steve J. Buckman | Australia | Electron Scattering from CF2 Radicals | |
| @ | 11:00-11:25 | Takako Kato | Japan | Plasma Diagnostics using Spectroscopy and Atomic Database | |
| @ | 11:25-11:50 | Nigel J. Mason | UK | Data Required for Understanding Atmospheric Pressure Plasmas | |
| 11:50-12:20 | 13. General Discussion (Chair: S. Hamaguchi and S. Samukawa) | ||||
| 12:20-12:30 | Closing Remarks | ||||
| @ | Zoran Lj. Petrović | Serbia | @ | ||