Hamaguchi Laboratory

Our recent focus in research is on plasma-material interactions in general, including their industrial applications. The aim of research is to understand fundamental mechanics of plasma-material interactions under various conditions. To achieve this, we combine plasma/beam experiments with numerical simulation/modeling. More specifically our current research topics include 1) etching, deposition, and surface modification processes for micro/nano electronics device manufacturing, 2) surface modification and functionalization of biomaterials by plasmas, 3) processing of water and biological systems by atmospheric-pressure plasmas mainly for applications in plasma medicine and plasma agriculture, and 4) dynamics and chemical reactions in plasmas under various conditions, including atmospheric-pressure plasmas.

If you are interested in our research, please feel free to contact me.

Satoshi Hamaguchi
Professor, Center for Atomic and Molecular Technologies, Osaka University.


Events & News

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Following conferences will be jointly held in Okinawa, Japan. See their websites for more information.
  • 4th International Conference on Data Driven Plasma Science (ICDDPS-4): website
  • 14th EU-Japan Joint Symposium on Plasma Processing (JSPP-14): website
The 5th Atomic Layer Process (ALP) Workshop will be held in Osaka, Japan (on-site only).
All talks will be given in Japanese.
website
Lab Hiking: Mt. Ikoma (Osaka & Nara)
We went to Mt. Ikoma on the border between Osaka and Nara prefectures.
Farewell and Guraduation Party
We held a farewell party for Enggar and Jaber, and graduation party for Nicolas.
JVST A cover art
A figure in a paper by Dr. Nicolas Mauchamp and Prof. Satoshi Hamaguchi was adopted as a cover art of JVST A.
See here .
We had a lab BBQ party at Expo Park.
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The 2nd Workshop on Artificial Intelligence in Plasma Science (WAIPS-2) was held in France (on-site and online).
website
Hanami and Farewell dinner for Erin/Welcome dinner for Sarah

CAMT Seminars

If you are interested in attending the seminars, please contact us.

"Development of Plasma Sources for Surface Treatment"
Prof. Magdaleno Vasquez Jr
College of Engineering, University of the Philippines-Diliman, The Philippines
Date: (Thu) 14:00-15:00 (JST)
Location: Main Conference Room (1st floor), Bldg. A12, Suita Campus, Osaka University
Webex Online Conference available

Abstract
Plasma treatment for surface modification has been extensively used as a result of its robustness, speed, and generally environmentally benign processes. These processes are carried out under different operating conditions that ranged from atmospheric pressure to high vacuum. Glow discharges, dielectric barrier discharges, and ion beams have been exploited to tailor the surface properties of materials for target applications and specific responses. Custom-built systems allowed for a further understanding of how plasma interacts with a surface. In our work, plasma-based processes provided alternative solutions to the modification and improvement of surfaces of locally available materials. These specially made plasma systems are used to modify materials for different applications. These include the deposition of decorative coatings for the furniture and creative industries. Use of plasma-modified natural fibers for cement reinforcement. Treatment of zeolitic materials to enhance the adsorption capacity. Fabrication of nanostructured plasmonic catalytic materials via plasma-induced reduction for wastewater treatment applications. Design of low-cost deposition systems. Development of low-energy ion source systems for surface modification and thin film growth. Optical and electrical characterizations of the plasma were used to correlate these process parameters with the resulting surface properties. Similarly, these results were also used to tune gas discharges for a targeted surface response, as well as to establish the repeatability and scalability of the process.

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"Effect of Working Pressure and Power on the Composition of a Cu2ZnSnS4 Thin Film Deposited by RF Sputtering of a Single Target"
Prof. Saleh N. Alamri
Physics Department, Faculty of Science, Taibah University, Madinah, Saudi Arabia
Date: (Tue) 14:00-15:00 (JST)
Location: Main Conference Room (1st floor), Bldg. A12, Suita Campus, Osaka University
Webex Online Conference available

Abstract
Compounds such as Cu2ZnSnS4 (CZTS) have attracted the concern of investigators of photovoltaic applications due to their abundance of elements and their nontoxic and promising optical characteristics. The impact of the working pressure and the radiofrequency (RF) power on the stoichiometry, structure and optical properties of Cu2ZnSnS4 layers, which were fabricated by the magnetron RF sputtering of a single quaternary target, are examined using different techniques, such as energy dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), Raman spectroscopy and spectrophotometry. The vacuum in the chamber decreased the number of sulfur atoms during the creation of the film. Then, increasing the working pressure from 20 mTorr to 100 mTorr improved the stoichiometry of the films. As the RF power increases from 75 W to 200 W, the atomic percentage of tin in the prepared film increases from 9.93% to 42.04%, and this increase is at the expense of the concentration of other elements.

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"Energy Transition, Demand Response Models and the Impact of the Cloud on the Energy sector"
Ms. Neyla Benkadda
UDIMA University Madrid, Spain
Date: (Wed) 16:00-17:00 (JST)
Location: Main Conference Room (1st floor), Bldg. A12, Suita Campus, Osaka University
Webex Online Conference available

Abstract
The European Union has adopted a European Green Deal, which foresees zero net emissions of greenhouse gases for all member states by 2050. As human beings are facing serious ecological problems, sustainable-development has got attention from more and more countries and has been treated as an economic and social development strategy. The development and utilization of renewable energy can promote the long-term sustainable development of local economies. In this context, energy utilities motivate the end users to take part in a sustainable energy transition through Demand Response management (DR). Residential consumers are thus encouraged by governments through incentives to install small scale renewable power generation units to build self-sustainability as well as support the grid by exporting their excess generation to grid. Such users are referred to as prosumers. This is very important for reducing the peak load of the power grid, the installed capacity of the system, and the operation cost. Because DR can help the integration of renewable energy sources characterized by their intermittency, it is believed that DR can reduce the carbon-intensity. In order to design such solutions, there is an increasing need of using Cloud computing with respect to its data-intensive application in real-time DR with advantages in high processing speed, unlimited data aggregation, cost-saving, security, and confidentiality. Thus, in this talk, we will discuss the implication of these new solutions for the green economy.

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"Physics Informed Artificial Intelligence"
Prof. Sadruddin. Benkadda
CNRS-Aix Marseille University, Marseille, France
Date: (Tue) 14:00-15:00 (JST)
Location: Main Conference Room (1st floor), Bldg. A12, Suita Campus, Osaka University
Webex Online Conference available

Abstract
In simulations of multiphysics problems using the numerical discretization of partial differential equations (PDEs), one still cannot seamlessly incorporate noisy data into existing algorithms, mesh generation remains complex, and high-dimensional problems governed by parameterized PDEs cannot be tackled. Moreover, solving inverse problems with hidden physics is often prohibitively expensive and requires different formulations and elaborate computer codes. Machine learning has emerged as a promising alternative, but training deep neural networks requires big data, not always available for scientific problems. Instead, such networks can be trained from additional information obtained by enforcing the physical laws (for example, at random points in the continuous space-time domain). Such physics-informed learning integrates (noisy) data and mathematical models, and implements them through neural networks or other kernel-based regression networks. We will review some of the prevailing trends in embedding physics into machine learning.

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"Charged particle dynamics in capacitively coupled radiofrequency discharges driven by complex waveforms"
Dr. Zoltán Donkó
Department of Complex Fluids, Wigner Research Centre for Physics, Hungary
Date: (Tue) 14:00-15:00 (JST)
Location: Main Conference Room (1st floor), Bldg. A12, Suita Campus, Osaka University
Webex Online Conference available

Abstract
Capacitively coupled plasmas (CCP) have been used for various surface modification applications for several decades. Depending on the choice of the gases and the operating conditions the fluxes and energy distributions of the ions (and radicals) bombarding the surfaces can be adjusted over wide domains. Charged particle dynamics largely influences basic plasma characteristics in these radio frequency (RF) plasma sources. The application of multi-frequency RF excitation in CCPs is shown to allow generating a high flux of energetic electrons at times of sheath collapse, which have the potential to neutralise positive surface charges deposited within nanoscale structures in semiconducting wafers.

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Past Seminars

PiAI Seminars

Seminar Series on "Physics informed Artificial Intelligence in Plasma Science"
For more information, please see here .